TD2000D is designed to meet 200mm and 300mm OEM tool specifications
Dual Channel Chiller
Low temperature;Heat medium DI Water /Ethylene Glycol
User friendly touch panel display with multiple functions
Small foot print
Multiple interfaces(LAM Analog,LAM-LonWorks,AMAT,AMAT.CHX,TEL)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47,CE mark;EN61000-6-2;EN61000-6-4;ENIS012100:EN60204-33:Certilied
| channel | channel1 | channel 2 | |||||
| Temp.control | Temp.range | -30℃~+90℃ | -30℃~+90℃ | ||||
| Temp.accuracy | ±0.1℃(@Constant Heat Load) | ±0.1℃(@Constant Heat Load) | |||||
| Temp.controller | Ptl00 PID Control | Ptl00 PID Control | |||||
| Heat medium | DI/EG | DI/EG | |||||
| Refrigerator | Capacity | 2HP | 2HP | ||||
| Cooling capacity | 2.2kW@-10℃ 8kW@10℃ 10kW@20℃ | ||||||
| Freon gas | R410A | R410A | |||||
| Heat exchanger | Plate type heat exchanger | Plate type heat exchanger | |||||
| Condenser | Water type | Water type | |||||
| Heater | Capacity | 4.5kW | 4.5kW | ||||
| Pump | Pump unit | All stainless pump | All stainless pump | ||||
| Motor | 2.2kW | 2.2kW | |||||
| Capacity | 25L/min@0.5MPa | 25L/min@0.5MPa | |||||
| Safety device | High temp. | Thermostat | Thermostat | ||||
| Empty protection | Float switch | Float switch | |||||
| Low level | Float switch | Float switch | |||||
| Pump overload | Motor breaker | Motor breaker | |||||
| Pump pressure | Pressure sensor | Pressure sensor | |||||
| Low flow alarm | Flow meterr | Flow meter | |||||
| Water leak | Water leak sensor | Water leak sensor | |||||
| Sensor protection | Abnormal sensor diagnosing | Abnormal sensor diagnosing | |||||
| Refrigerator overload | Motor breaker | Motor breaker | |||||
| Refrigerator pressure | Pressure sensor | Pressure sensorr | |||||
| Emergency stop | EMO switch | EMO switch | |||||
| Circuit breaker | Over-current breaker | Over-current breaker | |||||
| Piping connection | Coolant inlet | 3/4卡套(默认) | 3/4卡套(默认) | ||||
| Coolant outlet | 3/4卡套(默认) | 3/4卡套(默认) | |||||
| Facility Water inlet | Rc3/4"内螺纹 | Rc3/4"内螺纹 | |||||
| Facility Water outlet | Rc3/4"内螺纹 | Rc3/4"内螺纹 | |||||
| Reservoir tank+Heater tank | 35L | 35L | |||||
| Interface | LAM Analog;CHX;LAM-LonWorks;TEL DRM/SCCM;SMC | ||||||
| Outer dimensions | W:500xD:900xH:1500mm | ||||||
| Bare weight | 240kg | ||||||
| Power supply | 208VAC±10%50A 3-phase | ||||||
| 备注 | 定义客户特殊要求 | ||||||
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