苏州华源控股股份有限公司

: Chiller-常规水冷/热交换型产品设备

Chiller TD1000G

TD1000G is designed to meet 150mm and 200mm OEM tool specifications
Dual Channel Chiller/Chiller(Chiller/Heat Exchanger)
Wide temperature range and huge cooling capacity
User friendly touch panel display with multiple functions
Small foot print
Multiple interfaces(LAM,AMAT-CHX,TEL)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47,CE mark;EN61000-6-2;EN61000-6-4;ENIS012100:EN60204-33:Certilied

产品参数

channel		channel1	channel 2
Temp.control	Temp.range	-20℃~+90℃	-20℃~+90℃
	Temp.accuracy	±0.1℃@Constant Heat Load)	±0.1℃(@Constant Heat Load)
	Temp.controller	Ptl00 PID Control	Ptl00 PID Control
	Heat medium	Galden	Galden
Refrigerator	Capacity	2HP	2HP
	Cooling capacity	1kW@-10℃
	Freon gas	R410A	R410A
	Heat exchanger	Plate type heat exchanger	Plate type heat exchanger
	Condenser	Water type	Water type
Heater	Capacity	3kW	3kW
Pump	Pump unit	Magnetic coupling pump	Magnetic coupling pump
	Motor	0.75kW	0.75kW
	Capacity	15L/min@0.3MPa	15L/min@0.3MPa
Safety device	High temp.	Thermostat	Thermostat
	Empty protection	Float switch	Float switch
	Low level	Float switch	Float switch
	Pump overload	Motor breaker	Motor breaker
	Pump pressure	Pressure sensor	Pressure sensor
	Low flow alarm	Flow meterr	Flow meter
	Water leak	Water leak sensor	Water leak sensor
	Sensor protection	Abnormal sensor diagnosing	Abnormal sensor diagnosing
	Refrigerator overload	Motor breaker	Motor breaker
	Refrigerator pressure	Pressure sensor	Pressure sensor
	Emergency stop	EMO switch	EMO switch
	Circuit breaker	Over-current breaker	Over-current breaker
Piping connection	Coolant inlet	1/2卡套(默认)	1/2卡套(默认)
	Coolant outlet	1/2卡套(默认)	1/2卡套(默认)
	Facility Water inlet	Rc1/2”内螺纹	Rc1/2”内螺纹
	Facility Water outlet	Rc1/2”内螺纹	Rc1/2”内螺纹
Reservoir tank+Heater tank		6L	6L
Interface		LAM-LonWorks;LAM Analog;CHX;TEL DRM/SCCM;SMC
Outer dimensions		W:450xD:660xH:1600mm
Bare weight		230kg
Power supply		208VAC±10%32A 3-phase
备注		定义客户特殊要求

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