THE6KD is designed to meet 200mm and 300mm OEM tool speeifications
Single Channel heat exchanger
High temperature;Heat medium DI Water 50%+Ethylene Glycol 50%
User friendly touch panel display with multiple functions
Small foot print
Multiple interfaces(LAM,AMAT,AMAT-CHX,TEL)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47,CE mark;EN61000-6-2;EN61000-6-4;ENIS012100:EN60204-33:Certilied
| Temp.control | Temp.range | ( Facility Watertemperature+5℃)～+110℃ | ||||
| Temp.accuracy | ±0.1℃(CConstant Heat Load) | |||||
| Temp.controller | Pt100 PID control | |||||
| Heat medium | DI Water 50%+Ethylene Glycol 50% | |||||
| Heaterexchanger | Cooling Capacity | 条件 | 循环液温度(℃) | |||
| PCW进口温度18℃ | 25 | 30 | 45 | 55 | ||
| 冷却能力 | 6.1 | 8.8 | 14.9 | 21.6 | ||
| Heater exchanger | Plate type heat exchanger | |||||
| Heater | Capacity | 6kW | ||||
| Pump | Pump unit | All stainlesspump | ||||
| Motor | 2.2kW | |||||
| Capacity | 25L/min@0.5Mpa | |||||
| Safety device | High temp. | Thermostat | ||||
| Empty protection | Float switch | |||||
| Low level | Float switch | |||||
| Pump overload | Motor breaker | |||||
| Pump pressure | Pressure sensor | |||||
| Low flow Alarm | Flow meter | |||||
| Water leak | Water leak sensor | |||||
| Sensor protection | Abnormal sensor diagnosing | |||||
| Emergency stop | EMO switch | |||||
| Circuit breakerr | Over-current breaker | |||||
| Piping connection | Coolant inlet | 3/4"卡套(可选1分四分水器) | ||||
| Coolant outlet | 3/4"卡套(可选1分四分水器) | |||||
| Facility Water inlet | Rc1/2"内螺纹 | |||||
| Facility Water outlet | Rc1/2"内螺纹 | |||||
| Drain | 1/2"阀门 | |||||
| Purge | Purge control | 1/4卡套(<0.3MPa)(选配) | ||||
| Tank | 35L | |||||
| Interface | LAM Analog;AMATO/1;AMAT-CHX;SMC | |||||
| Outer dimensions | W:370xD:660xH:890mm | |||||
| Bare weight | 125kg | |||||
| Power supply | 208VAC±10%30A 3-phase | |||||
| 备注 | 定义客户特殊要求 | |||||
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