TD2000G is designed to meet 200mm and 300mm OEM tool specifications
Dual Channel Chiller/Chiller(Chiller/Heat Exchanger)
Wide temperature range and huge cooling capacity
User friendly touch panel display with multiple functions
Small foot print
Multiple interfaces(LAM,AMAT-CHX,TEL)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47,CE mark;EN61000-6-2;EN61000-6-4;ENIS012100:EN60204-33:Certilied
| channel | channel1 | channel2 | |||
| Temp.control | Temp.range | -30°℃~+90℃ | -30°℃~+90℃ | ||
| Temp.accuracy | ±0.1℃(@Constant Heat Load) | ±0.1℃(@Constant Heat Load) | |||
| Temp.controller | Ptl00 PID Control | Ptl00 PID Control | |||
| Heat medium | Galden | Galden | |||
| Refrigerator | Capacity | 2HP | 2HP | ||
| Cooling capacity | 2.2kW@-10℃ 8kW@10℃ 10kW/@20℃ | ||||
| Freon gas | R410A | R410A | |||
| Heat exchanger | Plate type heat exchanger | Plate type heat exchanger | |||
| Condenser | Watertype | Watertype | |||
| Heater | Capacity | 4.5kW | 4.5kW | ||
| Pump | Pump unit | Magnetic coupling pump | Magnetic coupling pump | ||
| Motor | 1.5kW | 1.5kW | |||
| Capacity | 25L/min@0.5MPa | 25L/min@0.5MPa | |||
| Safety device | High temp. | Thermostat | Thermostat | ||
| Empty protection | Float switch | Float switch | |||
| Low level | Float switch | Float switch | |||
| Pump overload | Motor breaker | Motor breaker | |||
| Pump pressure | Pressure sensor | Pressure sensor | |||
| Low flow alarm | Flow meter | Flow meter | |||
| Water leak | Water leak sensor | Water leak sensor | |||
| Sensor protection | Abnormal sensor diagnosing | Abnormal sensor diagnosing | |||
| Refrigerator overload | Motor breaker | Motor breaker | |||
| Refrigerator pressure | Pressure sensor | Pressure sensor | |||
| Emergency stop | EMO switch | EMO switch | |||
| Circuit breaker | Over-current breaker | Over-current breaker | |||
| Piping connection | Coolant inlet | 1/2卡套(默认)或3/4卡套 | 1/2卡套(默认)或3/4卡套 | ||
| Coolant outlet | 1/2卡套(默认)或3/4卡套 | 1/2卡套(默认)或3/4卡套 | |||
| Facility Water inlet | Rc3/4"内螺纹 | Rc3/4"内螺纹 | |||
| Facility Water outlet | Rc3/4"内螺纹 | Rc3/4"内螺纹 | |||
| Reservoir tank+Heater tank | 12L | 12L | |||
| Interface | LAM Analog;CHX;LAM-LonWorks;TEL DRM/SCCM;SMC | ||||
| Outer dimensions | W:550xD:700xH:1600mm | ||||
| Bare weight | 270kg | ||||
| Power supply | 208VAC±10%50A 3-phase | ||||
| 备注 | 定义客户特殊要求 | ||||
Copyright © 2016-2017 苏州华源控股股份有限公司 备案号：苏ICP备06012122号苏公网安备32050902100179号
