TS2000D is designed to meet 200mm and 300mm OEM tool specifications
Single Channel Chiller
Low temperature;Heat medium DI Water /Ethylene Glycol
User friendly touch panel display with multiple functions
Small foot print
Multiple interfaces(LAM Analog,LAM-LonWorks,AMAT,AMAT.CHX,TEL)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47,CE mark;EN61000-6-2;EN61000-6-4;ENIS012100:EN60204-33:Certilied
| Temp.control | Temp.range | -30℃~+90℃ | |
| Temp.accuracy | ±0.1℃(@Constant Heat Load) | ||
| Temp.controller | Ptl00 PID Control | ||
| Heat medium | DI/EG | ||
| Refrigerator | Capacity | 2HP | |
| Freon gas | R410A | ||
| Cooling capacity | 2.2kW@-10℃ 8kW@10℃ 10kW@20℃ | ||
| Heat exchanger | Plate type heat exchanger | ||
| Condenser | Water type | ||
| Heater | Capacity | 4.5kW | |
| Pump | Pump unit | All stainless pump | |
| Motor | 2.2kW | ||
| Capacity | 25L/min@0.5MPa | ||
| Safety device | High temp. | Thermostat | |
| Empty protection | Float switch | ||
| Low level | Float switch | ||
| Pump overload | Motor breaker | ||
| Pump pressure | Pressure sensor | ||
| Low flow alarm | Flow meter | ||
| Water leak | Water leak sensor | ||
| Sensor protection | Abnormal sensor diagnosing | ||
| Refrigerator overload | Motor breaker | ||
| Refrigerator pressure | Pressure sensor | ||
| Emergency stop | EMO switch | ||
| Circuit breaker | Over-current breaker | ||
| Piping connection | Coolant inlet | 3/4卡套(默认) | |
| Coolant outlet | 3/4卡套(默认) | ||
| Facility Water inlet | Rc1/2"内螺纹 | ||
| Facility Water outlet | Rc1/2"内螺纹 | ||
| Reservoir tank+Heater tank | 35L | ||
| Interface | LAM Analog;CHX;LAM-LonWorks;AMAT;Neslab,TEL DRM/SCCM;SMC | ||
| Outer dimensions | W:430xD:610xH:1200mm | ||
| Bare weight | 120kg | ||
| Power supply | 208VAC±10%25A 3-phase | ||
| 备注 | 定义客户特殊要求 | ||
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